A waveguide type semiconductor photodetecting device has a semiconductor substrate, a photodetecting element, and a waveguide optically coupled with the photodetecting element which can avoid occurrence of light loss in the tapered waveguide even when a width of a light inciding side of the tapered waveguide...http://www.google.fr/patents/US5910012?utm_source=gb-gplus-shareBrevet US5910012 - Waveguide type semiconductor photodetecting device method for fabricating
Waveguide type semiconductor photodetecting device method for fabricating
