The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three...http://www.google.fr/patents/US8143681?utm_source=gb-gplus-shareBrevet US8143681 - Saw devices, processes for making them, and methods of use
Saw devices, processes for making them, and methods of use
