To provide a thermopile infrared detecting element capable of accurate temperature measurement at low cost. An infrared detecting element 1 using a silicon nitride film as a first structure layer 22 constituting a structure of a membrane portion 4 is provided. Unlike silicon oxide, the first structure...http://www.google.fr/patents/US6909093?utm_source=gb-gplus-shareBrevet US6909093 - Infrared detecting element, method of manufacturing the same and temperature measuring device
Infrared detecting element, method of manufacturing the same and temperature ...
