A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean wafers. A clean flow diverting valve is...http://www.google.fr/patents/US7140393?utm_source=gb-gplus-shareBrevet US7140393 - Non-contact shuttle valve for flow diversion in high pressure systems
Non-contact shuttle valve for flow diversion in high pressure systems
