A temperature sensing device employs a resonant polysilicon beam, in combination with electrical circuitry for oscillating the beam at its natural resonant frequency, to sense changes in temperature. The resonant beam is formed as part of a silicon layer, and the silicon layer is in direct...http://www.google.fr/patents/US5772322?utm_source=gb-gplus-shareBrevet US5772322 - Resonant microbeam temperature sensor
