In a first inter-layer insulator film above source/drain regions of basic cells constituting a gate array, first contact holes (joint contacts) are placed, so that wings (joint plates) electrically connected with the source/drain regions via plugs in those joint contacts is locally placed above the source/drain...http://www.google.fr/patents/US5929469?utm_source=gb-gplus-shareBrevet US5929469 - Contact holes of a different pitch in an application specific integrated circuit
Contact holes of a different pitch in an application specific integrated circuit
