A measuring apparatus including a light source that emits light with a wavelength that allows the light to be transmitted through and reflected at each measurement target, a splitter that splits the light from the light source into measurement light and reference light, a reference mirror at which the...http://www.google.fr/patents/US7446881?utm_source=gb-gplus-shareBrevet US7446881 - System, apparatus, and method for determining temperature/thickness of an object using light interference measurements
System, apparatus, and method for determining temperature/thickness of an ...
