Impure portions such as air bubbles and gelled portions in a liquid are removed so that the liquid can be discharged with improved cleanliness. Under condition that a return flow path and a liquid discharge flow path are closed, a pump chamber is expanded, thereby sucking the liquid in a liquid container...http://www.google.fr/patents/US6238576?utm_source=gb-gplus-shareBrevet US6238576 - Chemical liquid supply method and apparatus thereof
Chemical liquid supply method and apparatus thereof
