Fabrication of a micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array is fabricated from a substrate that is a first substrate of a single crystal material. Cavities are formed in a first side of the first...http://www.google.fr/patents/US7034984?utm_source=gb-gplus-shareBrevet US7034984 - Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
Fabrication of a high fill ratio reflective spatial light modulator with ...
