A method of fabricating a tiltable micro mirror plate includes forming a substrate comprising an upper surface and a hinge support post in connection with the upper surface, disposing over the substrate a first sacrificial material selected from the group of amorphous carbon, polyarylene, polyarylene...http://www.google.fr/patents/US7471440?utm_source=gb-gplus-shareBrevet US7471440 - Fabricating micro devices using sacrificial materials
Fabricating micro devices using sacrificial materials
