A micromechanical sensing apparatus includes a micromechanical sensor having a stationary element and a movable element which are electrically conductive, and a sensing circuit responsive to the micromechanical sensor for generating an output indicative of a sensed quantity. The sensing circuit may have...http://www.google.fr/patents/US5583290?utm_source=gb-gplus-shareBrevet US5583290 - Micromechanical apparatus with limited actuation bandwidth
Micromechanical apparatus with limited actuation bandwidth
