A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which...http://www.google.fr/patents/US7755824?utm_source=gb-gplus-shareBrevet US7755824 - Micromirror unit with torsion connector having nonconstant width
Micromirror unit with torsion connector having nonconstant width
