The invention relates to a method for the manufacture of field effect transistors of the coplanar and self-aligned type, obtained in thin film form on an insulating substrate....http://www.google.fr/patents/US4704784?utm_source=gb-gplus-shareBrevet US4704784 - Method of making thin film field effect transistors for a liquid crystal display device
Method of making thin film field effect transistors for a liquid crystal ...
