An integrated inductor is formed on an integrated circuit or other substrate. The inductor is formed of a stack of almost totally enclosed rings of conductive material in which each ring has a single gap. Vias connect adjacent rings on opposite sides of their gaps so as to form a coil shaped structure....http://www.google.fr/patents/US6614093?utm_source=gb-gplus-shareBrevet US6614093 - Integrated inductor in semiconductor manufacturing
Integrated inductor in semiconductor manufacturing
