A method of fabricating a thin film transistor by setting the temperature of a heat treatment for crystallizing an active layer which is formed on a substrate at a level not deforming the substrate and activating an impurity layer in a heat treatment method different from that employed for the heat treatment,...http://www.google.fr/patents/US7084052?utm_source=gb-gplus-shareBrevet US7084052 - Semiconductor device, display device and method of fabricating the same
Semiconductor device, display device and method of fabricating the same
