A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above the piezoeletric body; and a cavity under a vibrating portion formed by the lower electrode, the piezoeletric...http://www.google.fr/patents/US7477115?utm_source=gb-gplus-shareBrevet US7477115 - Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator
Piezoelectric resonator, method of manufacturing piezoelectric resonator ...
