There is disclosed a mask for light exposure which comprises being provided with a light transparent substrate and a mask pattern formed on the light transparent substrate, the mask pattern comprising a light screening pattern composed of a material which screens the exposure light and ...http://www.google.fr/patents/US5700605?utm_source=gb-gplus-shareBrevet US5700605 - Mask for light exposure and process for production of the same
Mask for light exposure and process for production of the same
