A particle detection on a periodic patterned surface is achieved in a method and apparatus using a single light beam scanning at a shallow angle over the surface. The surface contains a plurality of identical die with streets between die. The beam scans parallel to a street direction, while a light collection...http://www.google.fr/patents/US4898471?utm_source=gb-gplus-shareBrevet US4898471 - Particle detection on patterned wafers and the like
Particle detection on patterned wafers and the like
