In etching a metal line formed as a dual layer of aluminum alloy and molybdenum, the metal line consisting of the dual layer of aluminum alloy and molybdenum is etched through one-time wet etching by applying the etchant including HNO3, HClO4, a Ferric compound (Fe3+), and a Flouro compound (F−), the...http://www.google.fr/patents/US20050133758?utm_source=gb-gplus-shareBrevet US20050133758 - Method for fabricating liquid crystal display device
Method for fabricating liquid crystal display device
Numéro de demande: 10/950,492 Numéro de publication: US 2005/0133758 A1 Date de dépôt: 28 sept. 2004 Brevet délivré: US7358195 ( Date de délivrance 15 avr. 2008)
