Methods for forming platinum-iridium films, particularly in the manufacture of a semiconductor device, and devices (e.g., capacitors, integrated circuit devices, and memory cells) containing such films. ...http://www.google.fr/patents/US20040048467?utm_source=gb-gplus-shareBrevet US20040048467 - Devices containing platinum-iridium films and methods of preparing such films and devices
Devices containing platinum-iridium films and methods of preparing such ...
Numéro de demande: 10/639,409 Numéro de publication: US 2004/0048467 A1 Date de dépôt: 12 août 2003 Brevet délivré: US6900107 ( Date de délivrance 31 mai 2005)
