A protrusion is provided on a barrier member which at least partly confines a liquid between a projection system and a substrate. The protrusion is closer to the projection system than other parts of the barrier member to promote a meniscus of liquid to adhere between the protrusion and the projection...http://www.google.fr/patents/US8004654?utm_source=gb-gplus-shareBrevet US8004654 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
