A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an nSi layer that will form a source electrode and a drain electrode. Next, a metal layer...http://www.google.fr/patents/US6559066?utm_source=gb-gplus-shareBrevet US6559066 - Substrate for use in display element, method of manufacturing the same, and apparatus for manufacturing the same
Substrate for use in display element, method of manufacturing the same, and ...
