The present invention is directed to methods and apparatuses for removing bubbles from a process liquid. The process liquid can comprise a plating solution used in a plating tool. The process liquid is supplied to a tank. A plurality of streams of the process liquid are directed towards a surface of...http://www.google.fr/patents/US7615103?utm_source=gb-gplus-shareBrevet US7615103 - Apparatus and method for removing bubbles from a process liquid
Apparatus and method for removing bubbles from a process liquid
