An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus...http://www.google.fr/patents/US7465945?utm_source=gb-gplus-shareBrevet US7465945 - Method and apparatus for processing a micro sample
Method and apparatus for processing a micro sample
