An array of thin film piezoelectric resonators are formed on a substrate and connected in parallel to form a single piezoelectric resonator with enhanced piezoelectric coupling. The array includes a first conductive layer positioned on the substrate and defining a first electrode, a plurality...http://www.google.fr/patents/US5698928?utm_source=gb-gplus-shareBrevet US5698928 - Thin film piezoelectric arrays with enhanced coupling and fabrication methods
Thin film piezoelectric arrays with enhanced coupling and fabrication ...
