A process for laser processing an article which comprises: heating the intended article to be doped with an impurity to a temperature not higher than the melting point thereof, said article being made from a material selected from a semiconductor, a metal, an insulator, and a combination thereof; and...http://www.google.fr/patents/US7169657?utm_source=gb-gplus-shareBrevet US7169657 - Process for laser processing and apparatus for use in the same
Process for laser processing and apparatus for use in the same
