Nonvolatile memory cell and process in which a control gate or a thick dielectric film is used as a mask in the formation of a floating gate and also as a step in the formation and alignment of a select gate. The floating gate is relatively thin and has a side wall with a rounded curvature which, in...http://www.google.fr/patents/US6091104?utm_source=gb-gplus-shareBrevet US6091104 - Flash memory cell with self-aligned gates and fabrication process
Flash memory cell with self-aligned gates and fabrication process
