A micromechanical sensor element for recording the bonding of molecules to the micromechanical sensor element. The sensor element having a substrate and at least one electrical terminal. There is also an oscillatable element that is coupled to the electrical terminal in such a manner that an electrical...http://www.google.fr/patents/US7398671?utm_source=gb-gplus-shareBrevet US7398671 - Micromechanical sensor element
