In a laser process apparatus, a plurality of holes each having a predetermined shape are formed in a work upon radiation of light from an excimer laser. The apparatus is provided with a mask, in which a plurality of predetermined small holes are formed in correspondence with the plurality of holes to...http://www.google.fr/patents/US5389954?utm_source=gb-gplus-shareBrevet US5389954 - Laser process apparatus for forming holes in a workpiece
Laser process apparatus for forming holes in a workpiece
