An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity....http://www.google.fr/patents/US6741329?utm_source=gb-gplus-shareBrevet US6741329 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
