A slurry providing system, located between a main slurry providing system and a CMP machine, includes a providing barrel, which can either be used as a buffer tank to provide slurry to the CMP machine with interruption, or as an independent backup tank for store slurry. The providing barrel also includes...http://www.google.fr/patents/US6132078?utm_source=gb-gplus-shareBrevet US6132078 - Slurry providing system
