A thin film transistor includes an insulating substrate; a polysilicon pattern formed on the insulating substrate; a first nitride layer disposed on a channel portion of the polysilicon pattern; heavily doped semiconductor layer regions disposed in upper portions of the polysilicon pattern on sides of...http://www.google.fr/patents/US6100119?utm_source=gb-gplus-shareBrevet US6100119 - Thin film transistor and method for fabricating the same
Thin film transistor and method for fabricating the same
