Information from fan filter units and differential pressure gauges provided in a ceiling of a clean room is used to control directions and volumes of air flows blown from respective fan filter units. In order to improve a wind velocity distribution in the clean room, pressure in a ceiling chamber is...http://www.google.fr/patents/US6607435?utm_source=gb-gplus-shareBrevet US6607435 - Fan filter unit control system and clean room provided with same
Fan filter unit control system and clean room provided with same
