A microwave plasma enhanced PVD/CVD apparatus and method. The apparatus includes an evacuable deposition chamber having a plasma region and a deposition region adjacent one another. The apparatus also includes a source of microwave energy, and a microwave waveguide to transfer microwave energy from the...http://www.google.fr/patents/US5562776?utm_source=gb-gplus-shareBrevet US5562776 - Apparatus for microwave plasma enhanced physical/chemical vapor deposition
Apparatus for microwave plasma enhanced physical/chemical vapor deposition
