A bulk acoustic wave device includes: a bulk acoustic wave element including a piezoelectric layer formed on a substrate, a lower electrode contacting a lower surface of the piezoelectric layer, and an upper electrode contacting an upper surface of the piezoelectric layer and partially overlapping the...http://www.google.fr/patents/US7301260?utm_source=gb-gplus-shareBrevet US7301260 - Bulk acoustic wave device and method of manufacturing the same
Bulk acoustic wave device and method of manufacturing the same
