A handling apparatus, used for handling a carrier of semiconductor wafers, comprises a first mechanism for transferring a carrier between a loader/unloader table and a storage compartment, and a second mechanism, for moving the first mechanism in both vertical and horizontal directions. The first mechanism...http://www.google.fr/patents/US5064337?utm_source=gb-gplus-shareBrevet US5064337 - Handling apparatus for transferring carriers and a method of transferring carriers
Handling apparatus for transferring carriers and a method of transferring ...
