A method of making a substantial replica of a first imprint template which bears a first pattern is disclosed. The method includes filling recesses of the first pattern with a first material, removing the first material from the first imprint template to form a second imprint template which bears a second...http://www.google.fr/patents/US20070238037?utm_source=gb-gplus-shareBrevet US20070238037 - Imprint lithography
Numéro de demande: 11/392,950 Numéro de publication: US 2007/0238037 A1 Date de dépôt: 30 mars 2006 Brevet délivré: US7862756 ( Date de délivrance 4 janv. 2011)
