Air-bridges are formed at controlled lateral separations using the extremely high HF etch rate of a gap-fill spin-on-glass such as uncured hydrogen silsequioxane (HSQ) in combination with other dielectrics having a much slower etch rate in HF. The advantages of an air-bridge system with controlled lateral...http://www.google.fr/patents/US6297125?utm_source=gb-gplus-shareBrevet US6297125 - Air-bridge integration scheme for reducing interconnect delay
Air-bridge integration scheme for reducing interconnect delay
