Changes transmittance of an optical system used to expose a substrate are determined and used to control an exposure quantity of exposing light that is provided to the substrate. For example, the transmittance is measured before and after exposure of one surface in order to control the exposure quantity...http://www.google.fr/patents/US6628371?utm_source=gb-gplus-shareBrevet US6628371 - Exposure apparatus, method for exposure, and method for manufacturing semiconductor device
Exposure apparatus, method for exposure, and method for manufacturing ...
