A module carrying microcircuit LSI chips includes stacks of parallel ceramic sheets carrying thin capacitor plates laminated in a ceramic structure in which the capacitor plates either serve (1) as the power distribution conductors known as power planes or (2) are connected to power conducting vias which...http://www.google.fr/patents/US4328530?utm_source=gb-gplus-shareBrevet US4328530 - Multiple layer, ceramic carrier for high switching speed VLSI chips
Multiple layer, ceramic carrier for high switching speed VLSI chips