A system for inspecting a component is provided. The system includes an interferometer having a coated mirror, such as a coating that allows only a fraction of light to pass, where the coating has a predetermined thickness. An interference inspection system receives reflected light from the component...http://www.google.fr/patents/US7019841?utm_source=gb-gplus-shareBrevet US7019841 - System and method for inspecting a component using interferometry
System and method for inspecting a component using interferometry
