In the case that a stacked layer, in which another metal layer is stacked on an Al layer or Al alloy layer having a low resistance, is used as a wiring material, an etchant is provided which can etch to a substantially equal etching rate by executing only one etching on the each metal layer composing...http://www.google.fr/patents/US7101809?utm_source=gb-gplus-shareBrevet US7101809 - Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate
Method of manufacturing a substrate for an electronic device by using ...
