A semiconductor failure analysis system which includes a failure information collection unit for collecting, by bit, failure information concerned with a failure of a semiconductor, an inspection unit for examining relations between various types of inspection data obtained by inspection of the semiconductor...http://www.google.fr/patents/US20010000460?utm_source=gb-gplus-shareBrevet US20010000460 - Semiconductor failure analysis system
Numéro de demande: 09/731,745 Numéro de publication: US 2001/0000460 A1 Date de dépôt: 8 déc. 2000 Brevet délivré: US6404911 ( Date de délivrance 11 juin 2002)
