Production of microscopic and nanoscopic coils, by rolling up conductor layers during the removal of auxiliary layers from a substrate. By removing the auxiliary layer from the substrate, for example by virtue of a sacrificial layer situated in between being selectively etched away, the auxiliary layer...http://www.google.fr/patents/US7707714?utm_source=gb-gplus-shareBrevet US7707714 - Method for producing a microcoil
