A system for use in manufacturing semiconductor devices, is provided. The system includes an electrochemical processing tool and an image sensor. The electrochemical processing tool includes an electrode located at a central region of a platen. The electrode is adapted for contacting a wafer workpiece...http://www.google.fr/patents/US7416648?utm_source=gb-gplus-shareBrevet US7416648 - Image sensor system for monitoring condition of electrode for electrochemical process tools
Image sensor system for monitoring condition of electrode for ...
