An efficient method for the microfabrication of electronic devices which have been adapted for the analyses of biologically significant analyte species is described. The techniques of the present invention allow for close control over the dimensional features of the various components and layers...http://www.google.fr/patents/US5837454?utm_source=gb-gplus-shareBrevet US5837454 - Process for the manufacture of wholly microfabricated biosensors
Process for the manufacture of wholly microfabricated biosensors
