A method for manufacturing a microstructure, which includes at least one feature having a dimension less than 200 nm, on a work piece. Pulses of UV laser light having a duration of less than about 1 ps and a peak wavelength of less than about 380 nm are generated. These pulses of UV laser light are focused...http://www.google.fr/patents/US7057135?utm_source=gb-gplus-shareBrevet US7057135 - Method of precise laser nanomachining with UV ultrafast laser pulses
Method of precise laser nanomachining with UV ultrafast laser pulses
