Improved method of heat-treating a glass substrate, especially where the substrate is thermally treated (such as formation of films, growth of films, and oxidation) around or above its strain point If devices generating heat are formed on the substrate, it dissipates the heat well. An aluminum nitride...http://www.google.fr/patents/US6847097?utm_source=gb-gplus-shareBrevet US6847097 - Glass substrate assembly, semiconductor device and method of heat-treating glass substrate
Glass substrate assembly, semiconductor device and method of heat-treating ...
