An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion...http://www.google.fr/patents/US7355676?utm_source=gb-gplus-shareBrevet US7355676 - Environmental system including vacuum scavenge for an immersion lithography apparatus
Environmental system including vacuum scavenge for an immersion lithography ...
