A miniaturized NDIR gas sensor is manufactured using semiconductor micromachining techniques from a semiconductor material such as Si or GaAs. The NDIR gas sensor comprises an optical waveguide, a light source at one end of the waveguide, at least one light detector at the end of the waveguide opposite...http://www.google.fr/patents/US5444249?utm_source=gb-gplus-shareBrevet US5444249 - NDIR gas sensor
